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Option Coater Developer
- AD(adhesion) bake. - CCSS or LCSS system
- RRC & PR pump share function(2nozzle/1pump) - Swing dispens, VCD for glass process
Common
- THC / TCU / FFU / Bar-cod / VCD & Aligner(Glass sub.) / Add Bake unit (3set) / Spin unit Max. 4set
Utility Spec Power Power Phase Ampare Conn. Type
AC220 φ1 50A
Pressure Usage Fitting Tupe AIR Tube
Air(CDA) 5Kgf /㎠ 150L/min Swg 3/8" SUS or PFA
Vacuum ≥600mmHg 100L Swg 3/8" SUS or PFA
N2 1.5Kgf /㎠ 100L/min Swg 3/8" SUS or PFA
DI Water 1.5Kgf /㎠ 3L/min Swg 3/8" SUS or PFA
PCW 1.5Kgf /㎠ 20L/min Swg 3/8" SUS or PFA
Exhaust Exh. volume Type Duct Size Duct Material
2.8 Heat Φ100X2ea AL or SUS
2.8 Alkali Φ100X2ea PVC
2.8 Organic Φ100X2ea AL or SUS
Uniformity Process Test 2 inch Sapphier wafer (Coating)
Uniformity (%) (Max-min)/(Max+min) x 100
Coating Spec. Within a wafer ≤ 3.0 %
Wafer to wafer ≤ 3.0 %
Raw data Max(average data) 20480 Å
min(average data) 20132 Å
Uniformity Wafer to wafer 0.63%